Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 36; Iss. 3
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Electric potential distribution effects in dc diode sputtering discharges
D. Czekaj, E.K. Hollmann, A.B. Kozirev, V.A. Volpyas, A.G. ZaytsevVolume:
36
Year:
1989
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(89)90674-5
File:
PDF, 280 KB
english, 1989