Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 42; Iss. 2
Tilted angle implantations of B, Al and Ga in single crystalline Si
E.H.A. Dekempeneer, P.C. Zalm, C.J. Vriezema, J. Politiek, H.J. LigthartVolume:
42
Year:
1989
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(89)90700-3
File:
PDF, 631 KB
english, 1989