Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 39; Iss. 1-4
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Property modification of Ag films by ion assisted deposition
Xianzheng Pan, Feng Pan, Yezhi Yang, Songnian YaoVolume:
39
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90762-3
File:
PDF, 402 KB
english, 1989