Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 39; Iss. 1-4
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Formation of buried high-resistivity layers in InP crystals by MeV nitrogen ion implantation
Fulin Xiong, T.A. Tombrello, T.R. Chen, H. Wang, Y.H. Zhuang, A. YarivVolume:
39
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90832-x
File:
PDF, 583 KB
english, 1989