Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 39; Iss. 1-4
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Formation of rutile TiO2 induced by high-dose O+ -implantation and its characteristics
Yoshio Okabe, Masaya Iwaki, Katsuo Takahashi, Shigeo Ohira, B.V. CristVolume:
39
Year:
1989
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(89)90861-6
File:
PDF, 383 KB
english, 1989