Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1989 Vol. 39; Iss. 1-4
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XPS study of ion beam irradiation effects in polyimide layers
D. Karpuzov, K.L. Kostov, E. Venkova, P. Kirova, I. Katardjiev, G. CarterVolume:
39
Year:
1989
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(89)90897-5
File:
PDF, 495 KB
english, 1989