Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 50; Iss. 1-4
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Analysis of annealing and ion implantation effects in Ti/TiN contacts on silicon
Momir Milosavljević, Nataša Bibić, Davor Perus̃ko, Marko S. Stojanović, ian H. WilsonVolume:
50
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(90)90386-9
File:
PDF, 420 KB
english, 1990