Low energy ion beam annealing of incompletely amorphised...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1990 Vol. 44; Iss. 3

Low energy ion beam annealing of incompletely amorphised layers in Si

B. Zeroual, G. Carter
How much do you like this book?
What’s the quality of the file?
Download the book for quality assessment
What’s the quality of the downloaded files?
Volume:
44
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(90)90645-b
File:
PDF, 893 KB
english, 1990
Conversion to is in progress
Conversion to is failed