Low and high dose enhanced adhesion effects induced by fast...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1990 Vol. 44; Iss. 3

Low and high dose enhanced adhesion effects induced by fast heavy ion beams for Cu films on Si

Liu Zhengmin, Yang Kunshen, Yang Huazhong
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Volume:
44
Year:
1990
Language:
english
Pages:
3
DOI:
10.1016/0168-583x(90)90649-f
File:
PDF, 559 KB
english, 1990
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