Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
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18O isotope studies on the redistribution of oxygen in noncontinuous buried layers formed by high-dose oxygen ion implantation
R.J. Chater, J.A. Kilner, K.J. Reeson, A.K. Robinson, P.L.F. HemmentVolume:
45
Year:
1990
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(90)90796-w
File:
PDF, 530 KB
english, 1990