Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
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Heavy-ion backscattering spectrometry (HIBS) for high-sensitivity surface impurity detection
J.A. Knapp, B.L. DoyleVolume:
45
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(90)90804-4
File:
PDF, 397 KB
english, 1990