Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
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Comparison between oxygen depth profiles in oxygen-implanted titanium measured by RBS and XPS combined with argon sputtering
Masaya Iwaki, Yoshio Okabe, Katsumasa YabeVolume:
45
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(90)90819-g
File:
PDF, 441 KB
english, 1990