Room-temperature deposition and initial stages of cobalt...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1990 Vol. 45; Iss. 1-4

Room-temperature deposition and initial stages of cobalt silicide interface formation on A Si(111) √3 × √3 surface

L. Luo, G.A. Smith, Shin Hashimoto, W.M. Gibson
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Volume:
45
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(90)90882-u
File:
PDF, 483 KB
english, 1990
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