Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
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The microprobe at the Eindhoven University of Technology
P.H.A. Mutsaers, G. Los, S.S. Klein, L.C. De Folter, M.J.A. De VoigtVolume:
45
Year:
1990
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(90)90899-6
File:
PDF, 399 KB
english, 1990