Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
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Oxygen redistribution in silicon during zone melting recrystallization
P.W. Mertens, W. Vandervorst, J. LeclairVolume:
45
Year:
1990
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(90)90906-b
File:
PDF, 597 KB
english, 1990