Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1990 Vol. 45; Iss. 1-4
Computer simulation of ionized cluster beam bombardment on a carbon substrate
Yasunori YamamuraVolume:
45
Year:
1990
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(90)90929-o
File:
PDF, 806 KB
english, 1990