Composition and structure of titanium nitride films...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 59-60; Iss. part-P1

Composition and structure of titanium nitride films prepared by ion beam enhanced deposition

Xi Wang, Xianghuai Liu, Youshan Chen, Genqing Yang, Zuyao Zhou, Zhihong Zheng, Wei Huang, Shichang Zou
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Volume:
59-60
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)95221-x
File:
PDF, 363 KB
english, 1991
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