MeV ion-beam induced crystallization in high energy As+...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 59-60; Iss. part-P1

MeV ion-beam induced crystallization in high energy As+ ion-implanted silicon

Wang Zhong-Lie, Zhang Bo-Xu
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Volume:
59-60
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)95255-c
File:
PDF, 455 KB
english, 1991
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