Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 59-60; Iss. part-P1
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Damage induced in GaAs by high-energy Be, Si and Se implantation
Yves B. Trudeau, George E. Kajrys, Gilles Gagnon, John L. BrebnerVolume:
59-60
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)95287-n
File:
PDF, 439 KB
english, 1991