Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 59-60; Iss. part-P1
![](/img/cover-not-exists.png)
A channeling/RBS study of SOI structures by SIMOX using MeV ions
K. Touhouche, Y. Tao, A. Yelon, G. Kajrys, Y. Trudeau, K. Oxorn, S. Bultena, G. GagnonVolume:
59-60
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)95301-s
File:
PDF, 400 KB
english, 1991