Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 61; Iss. 1
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Energy deposition effects of additional ion bombardment on titanium oxides formed by oxygen implantation
Yoshio Okabe, Masaya Iwaki, Katsuo TakahashiVolume:
61
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)95558-u
File:
PDF, 414 KB
english, 1991