Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 59-60; Iss. part-P2
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The influence of the ion type on the anisotropic local melting of implanted silicon
Yakhya V. Fattakhov, Ildus B. Khaibullin, Tat'yana N. Vasil'yevaVolume:
59-60
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)95767-8
File:
PDF, 606 KB
english, 1991