The effect of post-implantation annealing on the...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 59-60; Iss. part-P2

The effect of post-implantation annealing on the microstructure of Al2O3 implanted with iron at − 185°C

P.S. Sklad, L. Romana, C.J. McHargue, C.W. White, J.C. McCallum
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Volume:
59-60
Year:
1991
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(91)95791-b
File:
PDF, 858 KB
english, 1991
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