Mechanical and tribological properties of silicon nitride...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 59-60; Iss. part-P2

Mechanical and tribological properties of silicon nitride films synthesized by ion beam enhanced deposition

Yuanru Chen, Shizhuo Li, Xushou Zhang, Hong Liu, Genqing Yang, Baochun Qu
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Volume:
59-60
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)95815-u
File:
PDF, 344 KB
english, 1991
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