Ion implantation in pulsed-laser-deposited barium-titanate...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 59-60; Iss. part-P2

Ion implantation in pulsed-laser-deposited barium-titanate thin films on silicon

S.B. Ogale, S.M. Kanetkar, Rashmi Nawathey-Dikshit, V.N. Koinkar, S.V. Rajershee, S.M. Chaudhari, V.P. Godbole
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Volume:
59-60
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)95828-2
File:
PDF, 499 KB
english, 1991
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