Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 59-60; Iss. part-P2
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Tribological properties of ion beam deposited diamond-like carbon film on silicon nitride
Rabi S. Bhattacharya, Richard L.C. Wu, Charles S. YustVolume:
59-60
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)95836-3
File:
PDF, 480 KB
english, 1991