Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 62; Iss. 2
High voltage modulator for pulsed ion implantation
Alaa A. Elmoursi, Gerard W. Malaczynski, Aboud H. HamdiVolume:
62
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)95914-y
File:
PDF, 214 KB
english, 1991