Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
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Control of BF2 dissociation in high-current ion implantation
Daniel F. Downey, Reuel B. LiebertVolume:
55
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(91)96134-7
File:
PDF, 616 KB
english, 1991