Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
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A RGA study of the cross-contamination of dopant species and low level impurities and the use of the RGA as a process monitor in a Varian 180XP
James J. Cummings, Daniel T. EnloeVolume:
55
Year:
1991
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(91)96135-8
File:
PDF, 589 KB
english, 1991