Control of wafer charging on the Varian EXTRION 1000 ion...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 55; Iss. 1-4

Control of wafer charging on the Varian EXTRION 1000 ion implanter

Shu Satoh, Bjorn O. Pedersen, Daniel F. Downey, Takao Sakase, Reuel B. Liebert, Susan B. Felch
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Volume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96139-c
File:
PDF, 456 KB
english, 1991
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