Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
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Control of ion beam current density and profile for high current ion implantation systems
Masayasu Tanjyo, Shuichi Fujiwara, Hiromichi Sakamoto, Masao NaitoVolume:
55
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)96141-7
File:
PDF, 350 KB
english, 1991