Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
A micro-uniformity test structure
W.A. Keenan, W.H. Johnson, L. Mantalas, L. Nguyen, L.A. LarsonVolume:
55
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(91)96155-e
File:
PDF, 670 KB
english, 1991