Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
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Investigation of backscattering and re-implantation during ion implantation into deep trenches
M. Posselt, E. Sobeslavsky, G. OttoVolume:
55
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)96166-i
File:
PDF, 393 KB
english, 1991