Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
Plasma cathode oxygen ion source
Takehisa Shibuya, Shizuyo Hashimoto, Eiji Yabe, Kazuo TakayamaVolume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96182-k
File:
PDF, 454 KB
english, 1991