Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
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Possible mechanisms for particle transport in ion implanters
D.A. Brown, P. Sferlazzo, J.F. O'HanlonVolume:
55
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(91)96192-n
File:
PDF, 531 KB
english, 1991