Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
Mechanically scanned ion implanters with two-axis disk tilt capability
T. Tamai, M. Diamond, B. Doherty, P. SplinterVolume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96202-v
File:
PDF, 545 KB
english, 1991