Amorphous Si — the role of MeV implantation in elucidating...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 55; Iss. 1-4

Amorphous Si — the role of MeV implantation in elucidating defect and thermodynamic properties

J.M. Poate, S. Coffa, D.C. Jacobson, A. Polman, J.A. Roth, G.L. Olson, S. Roorda, W. Sinke, J.S. Custer, M.O. Thompson, F. Spaepen, E. Donovan
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Volume:
55
Year:
1991
Language:
english
Pages:
11
DOI:
10.1016/0168-583x(91)96226-b
File:
PDF, 1.12 MB
english, 1991
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