Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
Epitaxial regrowth and lattice location of indium implanted in arsenic-preamorphized silicon
E. Alves, M.F. Da Silva, J.C. Soares, A.A. Melo, J. May, V. Haslar, P. Seidl, U. Feuser, R. ViandenVolume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96235-d
File:
PDF, 439 KB
english, 1991