Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
Isotope effects for ion-implantation profiles in silicon
B.G. Svensson, B. MohadjeriVolume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96251-f
File:
PDF, 502 KB
english, 1991