Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
An investigation of Si0.5Ge0.5 alloy oxidation by high dose oxygen implantation
J.E. Castle, H.D. Liu, J.F. Watts, J.P. Zhang, P.L.F. Hemment, U. Bussmann, A.K. Robinson, S.M. Newstead, A.R. Powell, T.E. Whall, E.H.C. ParkerVolume:
55
Year:
1991
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(91)96260-r
File:
PDF, 447 KB
english, 1991