Microscope-spectrophotometric analysis to determine the...

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1991 Vol. 55; Iss. 1-4

Microscope-spectrophotometric analysis to determine the origins of the colour variations on SIMOX wafers

Karen J. Reeson, Alan J. Criddle, Peter Pearson, Richard J. Chater, Kim Christensen, John Alderman, G. Roger Booker, John A. Kilner
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Volume:
55
Year:
1991
Language:
english
Pages:
7
DOI:
10.1016/0168-583x(91)96265-m
File:
PDF, 920 KB
english, 1991
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