Thermal-wave measurements of high-dose ion implantation

Thermal-wave measurements of high-dose ion implantation

Michael Taylor, Kurt Hurley, King Lee, Mark LeMere, Jon Opsal, Tim O'Brien
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Volume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96266-n
File:
PDF, 407 KB
english, 1991
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