Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1991 Vol. 55; Iss. 1-4
SIMOX-material quality in a semi-industrial production
J.M. Lamure, J. Margail, B. Biasse, J.F. Michaud, A. Soubie, C. Pudda, F. Gusella, C. JaussaudVolume:
55
Year:
1991
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(91)96287-u
File:
PDF, 510 KB
english, 1991