High fluence implantation in glasses: chemical interactions

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1992 Vol. 65; Iss. 1-4

High fluence implantation in glasses: chemical interactions

P. Mazzoldi, F. Caccavale, E. Cattaruzza, A. Boscolo-Boscoletto, R. Bertoncello, A. Glisenti, G. Battaglin, C. Gerardi
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Volume:
65
Year:
1992
Language:
english
Pages:
8
DOI:
10.1016/0168-583x(92)95068-3
File:
PDF, 727 KB
english, 1992
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