Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Nuclear microanalysis study of the growth of thin dielectric films on silicon by classical and rapid thermal treatments
S. RigoVolume:
64
Year:
1992
Language:
english
Pages:
11
DOI:
10.1016/0168-583x(92)95432-q
File:
PDF, 1017 KB
english, 1992