Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
![](/img/cover-not-exists.png)
The effect of ion beam mixing on SIMS depth resolution
J. Likonen, M. Hautala, I. KoponenVolume:
64
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95455-z
File:
PDF, 394 KB
english, 1992