Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Precipitation and segregation of Sb at Si-SiO2 interfaces during thermal oxidation
J.S. Williams, M. Petravic, Y.H. Li, J.A. Davies, G.R. PalmerVolume:
64
Year:
1992
Language:
english
Pages:
4
DOI:
10.1016/0168-583x(92)95457-3
File:
PDF, 336 KB
english, 1992