Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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Improvement of beam properties by optimizing ion optics and minimizing beam interactions
L.J. Vijgen, P. KruitVolume:
64
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95499-h
File:
PDF, 379 KB
english, 1992