High resolution depth profiling of light elements

Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms 1992 Vol. 64; Iss. 1-4

High resolution depth profiling of light elements

G. Dollinger, T. Faestermann, P. Maier-Komor
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Volume:
64
Year:
1992
Language:
english
Pages:
6
DOI:
10.1016/0168-583x(92)95508-o
File:
PDF, 581 KB
english, 1992
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