Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms
1992 Vol. 64; Iss. 1-4
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An investigation of the Cs bombardment induced altered layer in Si by MEIS, RBS, SIMS and IMPETUS simulation
R. Valizadeh, J.A. van den Berg, R. Badheka, A. Al Bayati, D.G. Armour, D. SykesVolume:
64
Year:
1992
Language:
english
Pages:
5
DOI:
10.1016/0168-583x(92)95543-z
File:
PDF, 513 KB
english, 1992